- Title
- Vibration and tracking control of a flexure-guided nanopositioner using a Piezoelectric strain sensor
- Creator
- Yong, Y. K.; Fleming, A. J.; Moheimani, S. O. R.
- Relation
- 1st International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 2011 (3M-Nano 2011). Proceedings of the 1st International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale 2011 (Changchun, China 29 August - 2 September, 2011)
- Relation
- http://3m-nano.org/main
- Publisher
- 3M-Nano Council
- Resource Type
- conference paper
- Date
- 2011
- Description
- This paper presents a novel sensing technique which uses a piezoelectric strain sensor for damping and accurate tracking of a nanopositioning stage. Piezoelectric elements have been used effectively as sensors for vibration control of smart structures. However, complications arise when one uses a piezoelectric strain sensor in a feedback loop for tracking. This is due to the high-pass characteristic of the piezoelectric strain voltage at low frequencies which tends to destabilize a closed-loop tracking system. Here, we overcome this problem by using a low-frequency bypass technique which replaces the low frequency signal with an estimate based on the open-loop system. Once the high-pass characteristic is accounted for, an analog Integral Resonant Control (IRC) and an integral tracking controller were implemented. The resultant tracking bandwidth of the closed-loop system was measured to be 1.86 kHz. To evaluate the closed-loop tracking performance of the nanopositioning stage, it was forced to track triangular waveforms at 40 Hz and 78 Hz. The closed-loop system shows significant improvement where the non-linearity of the system is effectively reduced.
- Subject
- piezoelectric strain sensor; nanopositioning stage; Integral Resonant Control; closed loop tracking system
- Identifier
- http://hdl.handle.net/1959.13/1038536
- Identifier
- uon:13555
- Language
- eng
- Hits: 1595
- Visitors: 1880
- Downloads: 1
| Thumbnail | File | Description | Size | Format |
|---|